This course provides an overview of various micro and nanofabrication technologies. Thin film deposition processes including evaporation, sputtering, oxidation, and chemical vapor deposition are introduced. An overview of basic pattern transfer principles using photolithography and wet/dry etching techniques is included in this course. This course provides many benefits and drawbacks of the different techniques, discussing issues that could affect yield of an overall process flow. Hands-on laboratory sessions provide students experience with microfabrication equipment and processes commonly used in industry.