This course introduces the technology involved with the creation and control of high vacuum environments that are typically used in the creation of nanometer and micron sized objects. It deals with the specialized equipment that is encountered in the nanotechnology field. The subject matter involves both physical processes and process control principles and common maintenance tasks. Topics include: vacuum principles, pumping and pressure measurement theory, vacuum materials and components, vacuum system troubleshooting. Lab activities in this course will involve working with practical vacuum components. Students will also design a basic process vacuum system.